chemical vapour deposition meaning in English
化学汽相淀积
化学蒸气沉积法
Examples
- Chemical vapour deposition
和化学气相淀积 - This paper has discussed preparing diamond - like carbon films by means of micro - wave ecr plasma source ion implantation and plasma enhanced chemical vapour deposition . we use the raman spectrum , ft - ir , afm and so on to study the dlc film . the result indicates : different bias voltage , frequency and gas flow rate of psii will have impact on sp3 proportion of dlc films , we find high bias voltage , low frequency and moderate gas flow rate can prepare high sp3 proportion dlc films ; we simply illustrate the influence of bias voltage on sp3 proportion of dlc films in pecvd
研究结果表明：在全方位离子注入技术中，不同的偏压、频率、气体流量都对薄膜中sp ~ 3键比例有所影响，文中对具体的影响进行了分析，发现偏压的增加、频率的降低和适中的气体流量可以制备出sp ~ 3键比例高的类金刚石膜；在等离子增强化学气相沉积技术中，对偏压对sp ~ 3键比例的影响也进行了简单分析。